• UHV system No.1 (STM, LEED, XPS, AES, EELS, UPS)
• UHV system No.2 with an active vibration isolation system (STM, LEED, AES, SEM)
• Ion Beam Line (RBS)
• SEM system

UHV system No.1 (STM, LEED, XPS, AES, EELS, UPS)

This UHV system is equipped with scanning tunnelling microscopy (STM), low-energy electron diffraction (LEED), x-ray photoelectron spectroscopy (XPS), Auger electron spectroscopy (AES), electron energy loss spectroscopy (EELS), and ultraviolet photoelectron spectroscopy(UPS).

UHV system No.2 with an active vibration isolation system (STM, LEED, AES, SEM)

This UHV system is equipped with scanning tunnelling microscopy (STM), low-energy electron diffraction (LEED), Auger electron spectroscopy (AES), scanning electron microscopy (SEM). This system has an active vibration isolation system so that we can get high-resolution STM images.

Ion Beam Line (RBS)

SEM system

This system has a vibration isolaton system, so we can get high-resolution SEM image. We use this system to observe the shape of STM tips.

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Furo-cho Chikusa, Nagoya, 464-8603 Japan

YUHARA Surface Science Group, Department of Energy Science and Engineering, School of Engineering, Nagoya University